Laser-assisted material composition engineering of SiGe planar waveguides
نویسندگان
چکیده
We report the compositional engineering of silicongermanium planar microstructures through laser processing. The effects of the laser treatment are assessed through microscope imaging and Raman spectroscopy. Our results reveal that the laser-exposed regions display a significant change in the material
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تاریخ انتشار 2017